High Hardness Polished ZrO2 Zirconium Oxide Substrate Zirconia Ceramic Sheet
Introduction of Zirconia Ceramic Substrates
In terms of functional ceramics, zirconia ceramic substrates are used as induction heating tubes, refractory materials, and heating elements due to their excellent high temperature resistance.
Zirconia ceramics have sensitive
electrical
parameters, high
toughness
, high
flexural strength
and high
wear resistance
, excellent
heat insulation
performance, and the
thermal expansion coefficient
close to that of steel. They are mainly used in oxygen sensors, thermal substrates for fuel cells, solid oxide fuel cells and high temperature heating elements and other fields.
Why Polished?
Three major benefits of lapping and polishing for the ceramic substrate:
1. A finer pattern can be obtained.
2. Better parallelism of the upper and lower surfaces (thickness tolerance) can be achieved.
3. A thinner metallization layer can be acquired.
Material Properties of
Zirconia Ceramic
Substrates
Zirconia Ceramic Substrate
|
Item
|
Unit
|
ZrO2
|
Mechanical
Properties
|
Color
|
/
|
White
|
Density
|
g/cm
3
|
≥6
|
Water Absorption
|
%
|
0
|
Vickers Hardness
(
Load 4.9N)
|
Gpa
|
11
|
Young's Modulus
|
GPa
|
200
|
Flexural Strength
|
Mpa
|
>800
|
Fracture Toughness
|
MPa
·
m
1/2
|
5.0
|
Thermal
Properties
|
Max. Service Temperature (Non-loading)
|
ºC
|
1000
|
CTE (Coefficient of
Thermal Expansion)
(
20-800ºC)
|
1×
10
-6
/ºC
|
7.8
|
Thermal Shock Resistance
|
≥
10
Times
|
No
Crack
|
Thermal Conductivity
(25ºC)
|
W/m·K
|
>3
|
Specific Heat (25ºC)
|
J/kg·K
|
460
|
Electrical
Properties
|
Volume R
esistivity
(
25ºC)
|
Ω
·
cm
|
≥10
13
|
Dielectric Strength
|
KV/mm
|
≥10
|
Dielectric C
onstant
(
25ºC, 1MHz )
|
(E)
|
33
|
Dielectric Loss Angle
(
25ºC, 1MHz )
|
×10
-4
|
≤16
|
Production Process
of Zirconia Ceramic Substrate
s
Product Inspection